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HIGH-POWER-PLASMA PECVD OF SiNx AND Al2O3 FOR …
WebThe aluminium oxide deposition process inside a vacuum reactor using oxygen and trimethylaluminium (TMA) as precursor is highly sensitive, and needs to occur under very … WebAbstract. We investigated hydrogenated aluminum oxide (a-Al 1-x O x:H) as a high quality rear surface passivation layer of crystalline silicon solar cells.The a-Al 1-x O x:H films were deposited by plasma-enhanced chemical vapor deposition (PECVD) using a mixture of trimethylaluminum (TMA), carbon dioxide (CO 2), and hydrogen (H 2) at a low substrate … christumclinc.org
Effect of TMA consumption on average solar cell …
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